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A micromachined vector light sensor

Zhuo, DH; Rai, A; Vosoogh-Grayli, S; Leach, GW; Bahreyni, B

Bahreyni, B (corresponding author), Simon Fraser Univ, Sch Mechatron Syst Engn, Surrey, BC, Canada.

SENSORS AND ACTUATORS A-PHYSICAL, 2020; 311 ():

Abstract

We report the design, fabrication, and performance characteristics of a novel microfabricated light sensor designed to determine the intensity and dir......

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