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Nanometric cutting mechanism of silicon carbide

Wang, JS; Fang, FZ

Fang, FZ (corresponding author), Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Lab Micro Nano Mfg Technol MNMT, Tianjin 300072, Peoples R China.

CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2021; 70 (1): 29

Abstract

Ductile to brittle transition is critical to achieve nanometric surfaces in the ultraprecision diamond cutting of silicon carbide. Although atomic sim......

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