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The sputtering performance of Ag sputtering targets with different microstructure

Ning, ZD; Wang, YQ; Li, SX; Tang, K; Wen, M

Wen, M (通讯作者),Kunming Inst Precious Met, Kunming 650106, Yunnan, Peoples R China.

VACUUM, 2023; 210 ():

Abstract

Ag thin films are widely used as the key material for electronic industries, and magnetron sputtering has become a general approach for Ag thin films ......

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