Circular Tracking Performance of a Flexure-Based Micro-Motion Stage-MedSci.cn - 梅斯（MedSci）

Circular Tracking Performance of a Flexure-Based Micro-Motion Stage

Du, YS; Liu, HB

Du, YS (通讯作者)，Beijing Univ Technol, Fac Mat & Mfg, Beijing 100124, Peoples R China.;Du, YS (通讯作者)，Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China.

EXPERIMENTAL TECHNIQUES, 2022; 46 (3): 497

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