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Improvement of Al thin film morphology with picosecond pulsed laser deposition in burst mode

Dai, SJ; Yu, J; He, JG; Liu, Y; Mo, ZQ; Wu, EL; Meng, JJ

Yu, J (corresponding author), Chinese Acad Sci, Aerosp Informat Res Inst, Beijing 100094, Peoples R China.; Yu, J (corresponding author), Univ Chinese Acad Sci, Beijing 100049, Peoples R China.

APPLIED PHYSICS EXPRESS, 2021; 14 (7):

Abstract

We studied the influences of the number of sub-pulses within a burst on the surface morphology of Al thin films deposited by picosecond pulsed laser. ......

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