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Sub-10 nm fabrication: methods and applications

Chen, YQ; Shu, ZW; Zhang, S; Zeng, P; Liang, HK; Zheng, MJ; Duan, HG

Duan, HG (corresponding author), Hunan Univ, Coll Mech & Vehicle Engn, Natl Engn Res Ctr High Efficiency Grinding, State Key Lab Adv Design & Mfg Vehicle Body, Changsha 410082, Peoples R China.

INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING, 2021; 3 (3):

Abstract

Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance for advancing nanoscience and nanotechnology. While the ......

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