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Fundamental principles and development of proximity-field nanopatterning toward advanced 3D nanofabrication

Nam, SH; Hyun, G; Cho, D; Han, SG; Bae, G; Chen, HM; Kim, K; Ham, YJ; Park, J; Jeon, S

Jeon, S (corresponding author), Korea Adv Inst Sci & Technol KAIST, Dept Mat Sci & Engn, Daejeon 34141, South Korea.; Park, J (corresponding author), Kumoh Natl Inst Technol, Sch Mat Sci & Engn, Gumi 39177, Gyeongbuk, South Korea.; Park, J (corresponding author), Kumoh Natl Inst Technol, Dept Energy Engn Convergence, Gumi 39177, Gyeongbuk, South Korea.; Jeon, S (corresponding author), Korea Adv Inst Sci & Technol, KAIST Inst NanoCentury KINC, Daejeon 34141, South Korea.

NANO RESEARCH, 2021; 14 (9): 2965

Abstract

Three-dimensional (3D) nanoarchitectures have offered unprecedented material performances in diverse applications like energy storages, catalysts, ele......

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