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Application of broad-beam scanning exposure to fabricate low-wavefront-error holographic gratings

Zhao, YX; Zeng, LJ; Li, LF

Zeng, LJ (corresponding author), Tsinghua Univ, Dept Precis Instruments, State Key Lab Precis Measurement Technol & Instru, Beijing, Peoples R China.

OPTICAL ENGINEERING, 2021; 60 (4):

Abstract

Gratings with low diffracted wavefront errors are crucial in many applications. Existing methods to reduce the diffracted wavefront errors of holograp......

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