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Quantum Transport Properties of Industrial Si-28/(SiO2)-Si-28

Sabbagh, D; Thomas, N; Torres, J; Pillarisetty, R; Amin, P; George, HC; Singh, K; Budrevich, A; Robinson, M; Merrill, D; Ross, L; Roberts, J; Lampert, L; Massa, L; Amitonov, SV; Boter, JM; Droulers, G; Eenink, HGJ; van Hezel, M; Donelson, D; Veldhors

Scappucci, G (reprint author), Delft Univ Technol, QuTech & Kavli Inst Nanosci, POB 5046, NL-2600 GA Delft, Netherlands.

PHYSICAL REVIEW APPLIED, 2019; 12 (1):

Abstract

We investigate the structural and quantum transport properties of isotopically enriched Si-28/(SiO2)-Si-28 stacks deposited on 300-mm Si wafers in an ......

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