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Molecular dynamics simulation of stress induced by energetic particle bombardment in Mo thin films

Zhang, M; Rao, ZX; Kim, KS; Qi, Y; Fang, L; Sun, K; Chason, E

Zhang, M (corresponding author), Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China.

MATERIALIA, 2021; 16 ():

Abstract

Molecular dynamics (MD) simulations are performed to analyze the evolution of defects and stress caused by low energy (25-400 eV) Ar bombardment of po......

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