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The etching process and mechanism analysis of Ta-Sb2Te3 film based on inductively coupled plasma

Xu, YK; Song, SN; Fang, WC; Li, CX; Song, ZT

Song, SN (corresponding author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China.

JOURNAL OF SEMICONDUCTORS, 2020; 41 (12):

Abstract

Compared to the conventional phase change materials, the new phase change material Ta-Sb2Te3 has the advantages of excellent data retention and good m......

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