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Polymeric lithography editor: Editing lithographic errors with nanoporous polymeric probes

Rajasekaran, PR; Zhou, CH; Dasari, M; Voss, KO; Trautmann, C; Kohli, P

Kohli, P (reprint author), Southern Illinois Univ, Dept Chem & Biochem, Carbondale, IL 62901 USA.

SCIENCE ADVANCES, 2017; 3 (6):

Abstract

A new lithographic editing system with an ability to erase and rectify errors in microscale with real-time optical feedback is demonstrated. The erasi......

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