The influence of high-temperature nitridation process on the crystalline quality of semipolar (11(2)over-bar2) GaN epitaxial films-MedSci.cn - 梅斯（MedSci）

The influence of high-temperature nitridation process on the crystalline quality of semipolar (11(2)over-bar2) GaN epitaxial films

Li, WL; Wang, LS; Chai, RH; Wen, L; Lu, HX; Wang, HH; Yang, SY; Sun, WH

Wang, LS (通讯作者)，Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing Key Lab Low Dimens Semicond Mat & Device, Beijing 100083, Peoples R China.

CURRENT APPLIED PHYSICS, 2022; 39 (): 38

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