Process of Au-Free Source/Drain Ohmic Contact to AlGaN/GaN HEMT-MedSci.cn

Process of Au-Free Source/Drain Ohmic Contact to AlGaN/GaN HEMT

Zhang, LQ; Wu, XL; Miao, WQ; Wu, ZY; Xing, Q; Wang, PF

Wu, ZY (通讯作者)，Henan Normal Univ, Coll Elect & Elect Engn, 46 East Construct Rd, Xinxiang 453007, Henan, Peoples R China.;Xing, Q (通讯作者)，Henan Inst Technol, Coll Intelligent Engn, 699 Pingyuan Rd East Sect, Xinxiang 453003, Henan, Peoples R China.