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Growth defects in heteroepitaxial diamond

Lebedev, V; Engels, J; Kustermann, J; Weippert, J; Cimalla, V; Kirste, L; Giese, C; Quellmalz, P; Graff, A; Meyer, F; Hofer, M; Sittinger, V

Lebedev, V (corresponding author), Fraunhofer IAF, Fraunhofer Inst Appl Solid State Phys, D-79108 Freiburg, Germany.

JOURNAL OF APPLIED PHYSICS, 2021; 129 (16):

Abstract

In focus of this report are the mechanisms of formation, propagation, and interaction of growth defects in heteroepitaxial diamond films along with th......

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