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Straightforward path to Zernike polynomials

Yen, A

Yen, A (corresponding author), ASML Technol Dev Ctr, San Jose, CA 95131 USA.

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 2021; 20 (2):

Abstract

Starting from Weierstrass' approximation theorem, Zernike polynomials are obtained by a few straightforward steps involving only the recast of the abe......

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