A sequential resampling approach for imbalanced batch process fault detection in semiconductor manufacturing-MedSci.cn - 梅斯（MedSci）

A sequential resampling approach for imbalanced batch process fault detection in semiconductor manufacturing

Zhang, Y; Peng, P; Liu, CD; Xu, YY; Zhang, HM

Zhang, HM (通讯作者)，Tsinghua Univ, Dept Automat, Beijing 100091, Peoples R China.

JOURNAL OF INTELLIGENT MANUFACTURING, 2022; 33 (4): 1057

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