Effects of atomic oxygen on the growth of NiO films by reactive magnetron sputtering deposition-MedSci.cn

Effects of atomic oxygen on the growth of NiO films by reactive magnetron sputtering deposition

Xu, W; Mao, X; Zhou, N; Zhang, QY; Peng, B; Shen, Y

Xu, W (通讯作者)，Chongqing Technol & Business Univ, Natl Res Base Intelligent Mfg Serv, Chongqing Key Lab Catalysis & New Environm Mat, Chongqing 400067, Peoples R China.;Zhang, QY (通讯作者)，Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China.;Zhang, QY (通讯作者)，Dalian Univ Technol, Sch Phys, Dalian 116024, Peoples R China.

VACUUM, 2022; 196 ():

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Effects of atomic oxygen on the growth of NiO films by reactive magnetron sputtering deposition

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