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Trend and influence of ITO etchant concentration under mass production conditions

Liu, D; Liu, Y; Huang, ZH; Wu, QY; Wu, X; Tian, MK; Ning, ZY; Guan, F; Zhang, C; Wang, ZJ; Min, TY; Feng, JH; Fan, C; Fang, L

Liu, D; Liu, Y (corresponding author), Chongqing BOE Optoelect Technol Co Ltd, Chongqing 400700, Peoples R China.; Liu, D (corresponding author), Chongqing Univ, Dept Appl Phys, Chongqing 400044, Peoples R China.; Liu, Y (corresponding author), Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China.

CHINESE JOURNAL OF LIQUID CRYSTALS AND DISPLAYS, 2021; 36 (4): 549

Abstract

The ITO etching production line consists of three components : etching equipment, central chemical supply system (CCSS) , and etchant management syste......

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