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Impact of TID on Within-Wafer Variability of Radiation-Hardened SOI Wafers

Zheng, QW; Cui, JW; Yu, XF; Li, YD; Lu, W; He, CF; Guo, Q

Zheng, QW (corresponding author), Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Key Lab Funct Mat & Devices Special Environm, Urumqi 830011, Peoples R China.

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2021; 68 (7): 1423

Abstract

Impact of total ionizing dose (TID) on the within-wafer variability of radiation-hardened (RH) silicon-on-insulator (SOI) wafers is investigated in th......

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