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THz Thin Film Varactor Based on Integrated Ferroelectric HfZrO2

Abdulazhanov, S; Le, QH; Huynh, DK; Wang, DF; Lehninger, D; Kämpfe, T; Gerlach, G

Abdulazhanov, S (通讯作者),Fraunhofer IPMS, Ctr Nanoelect Technol, D-01109 Dresden, Germany.;Gerlach, G (通讯作者),Tech Univ Dresden, Inst Solid State Elect, D-01067 Dresden, Germany.

ACS APPLIED ELECTRONIC MATERIALS, 2023; 5 (1): 189

Abstract

In this paper, we present a broadband microwave characterization of ferroelectric hafnium zirconium oxide (Hf0.5Zr0.5O2) metal-ferroelectric-metal (MF......

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