Baidu
map

Magnetron-like miniature ion source

Grzebyk, T; Szyszka, P; Gorecka-Drzazga, A

Grzebyk, T (reprint author), Wroclaw Univ Sci & Technol, Fac Microsyst Elect & Photon, Dept Microengn & Photovolta, 11-17 Janiszewskiego St, PL-50372 Wroclaw, Poland.

VACUUM, 2018; 151 (): 167

Abstract

This paper describes a new type of a miniature ion source (about 0.05 cm(3)), partially based on the construction of a magnetron but made with the use......

Full Text Link


Baidu
map
Baidu
map
Baidu
map