Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone-MedSci.cn - 梅斯（MedSci）

Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone

Williams, RP; Vatankhah, E; Hall, NA

Williams, RP (通讯作者)，Univ Washington, Appl Phys Lab, Seattle, WA 98105 USA.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (4): 589

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