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Strain Balanced AlGaN/GaN/AlGaN nanomembrane HEMTs

Chang, TH; Xiong, KL; Park, SH; Yuan, G; Ma, ZQ; Han, J

Xiong, KL (reprint author), Yale Univ, Dept Elect Engn, New Haven, CT 06511 USA.

SCIENTIFIC REPORTS, 2017; 7 ( ):

Abstract

Single crystal semiconductor nanomembranes (NM) are important in various applications such as heterogeneous integration and flexible devices. This pap......

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