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Monolithic Silicon Photonics

Letavic, T; Sorbara, M; Geiwont, K; Bian, YS; Jain, V; Jain, S; Ramachandran, K; Wu, ZJ; Hedrick, B; Dezfulian, KK; Lin, YR; Tang, TJ; Houghton, T; Fisher, D; Hirokawa, T; Esopi, M; Karra, V; Lee, WS; Zhang, M; Lubguban, RSJ; Cho, JK; Cao, RT; Ding, HY; Chandran, S; Rakowski, M; Aboketaf, A; Krishnamurthy, S; Mills, S; Robson, N; Melville, I; Fox, R; Gupta, V; Yu, A

Letavic, T (通讯作者),GLOBALFOUINDRIES, Malta, NY 12020 USA.

2023 IEEE BICMOS AND COMPOUND SEMICONDUCTOR INTEGRATED CIRCUITS AND TECHNOLOGY SYMPOSIUM, BCICTS, 2023; (): 263

Abstract

This paper details a monolithic approach to the integration of photonic systems. Polarization diverse photonic components are fabricated in a 45nm sil......

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