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Features of Nanostructures Sputtering

Kapustin, SN; Matveev, VI; Eseev, MK

Kapustin, SN (reprint author), Northern Arctic Fed Univ, Severnaya Dvina Emb 17, Arkhangelsk 163002, Russia.

IV INTERNATIONAL YOUNG RESEARCHERS' CONFERENCE: PHYSICS, TECHNOLOGIES AND INNOVATION (PTI-2017), 2017; 1886 ( ):

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