期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (7)
The soft lithographic fabrication of high-aspect-ratio polydimethylsiloxane (PDMS) microstructures is quite challenging because of the strong interfac......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (10)
Microelectrode arrays (MEAs) are crucial tools for evaluating the modulating effects during in vivo neuromodualtion and it is crucial to develop novel......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (8)
This paper presents a novel architecture for annular and circular electrode piezoelectric micromachined ultrasound transducers (AC-PMUTs) with mechani......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (8)
The micro soft robot which mimics the movement of microorganisms is one of the important research directions in the field of robotics. This study prop......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (5)
In this work, a novel on-chip micro pressure sensor was developed for microfluidic pressure monitoring. Polydimethylsiloxane (PDMS) microfluidic chip ......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6)
During the cutting process of the original molds, the micro-burrs produced by the machining process will affect the optical properties of the optical ......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6)
Based on the resonant electric field microsensors with coplanar electrodes, a novel non-intrusive measurement scheme of DC power-line voltage suitable......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (8)
Flexible/stretchable electronics have been well-developed in epidermal devices, wearable electronic systems and soft robotics for physiological signal......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (5)
In this paper, optoelectronic characteristics and related switching behavior of one monolithically integrated silicon light-emitting device (LED) with......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (9)
Since the end of the last century, energy harvesting technologies have obtained prominent development as the sustainable power supplies for billions o......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6)
The force-to-rebalance (FTR) closed-loop detection method is commonly used to expand the bandwidth (BW) for micro-electro-mechanical system (MEMS) gyr......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (10)
The use of liquid alloy micro-printing methods for stretchable conductors and sensors has become a hot topic of micromachining research because of its......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (10)
This paper investigates the characteristics of higher-order transverse mode fully clamped membrane resonators that are piezoelectrically transduced as......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (7)
Acoustofluidic devices based on surface acoustic waves (SAWs) have been widely applied in biomedical research for the manipulation and separation of c......
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6)
In this paper, an analytical method of resonant frequency, tuning range, the effective relative dielectric constant, and characteristic impedance is p......