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Fabrication of high-aspect-ratio polydimethylsiloxane microstructures by reducing the interfacial adhesion in soft lithography

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (7)

The soft lithographic fabrication of high-aspect-ratio polydimethylsiloxane (PDMS) microstructures is quite challenging because of the strong interfac......

Implanted microelectrode arrays for evaluating inhibited seizure modulated by light-responsive hydrogel

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (10)

Microelectrode arrays (MEAs) are crucial tools for evaluating the modulating effects during in vivo neuromodualtion and it is crucial to develop novel......

A piezoelectric micromachined ultrasonic transducer with mechanical grooves

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (8)

This paper presents a novel architecture for annular and circular electrode piezoelectric micromachined ultrasound transducers (AC-PMUTs) with mechani......

A programmable 3D printing method for magnetically driven micro soft robots based on surface tension

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (8)

The micro soft robot which mimics the movement of microorganisms is one of the important research directions in the field of robotics. This study prop......

On-chip micro pressure sensor for microfluidic pressure monitoring

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (5)

In this work, a novel on-chip micro pressure sensor was developed for microfluidic pressure monitoring. Polydimethylsiloxane (PDMS) microfluidic chip ......

Micro-burrs in machining original molds of an optical functional film with a triangular pyramidal texture

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6)

During the cutting process of the original molds, the micro-burrs produced by the machining process will affect the optical properties of the optical ......

Non-intrusive DC voltage measurement based on resonant electric field microsensors

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6)

Based on the resonant electric field microsensors with coplanar electrodes, a novel non-intrusive measurement scheme of DC power-line voltage suitable......

Facile fabrication of sensitivity-tunable strain sensors based on laser-patterned micro-nano structures

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (8)

Flexible/stretchable electronics have been well-developed in epidermal devices, wearable electronic systems and soft robotics for physiological signal......

Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems*

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (5)

In this paper, optoelectronic characteristics and related switching behavior of one monolithically integrated silicon light-emitting device (LED) with......

Technology evolution from micro-scale energy harvesters to nanogenerators

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (9)

Since the end of the last century, energy harvesting technologies have obtained prominent development as the sustainable power supplies for billions o......

Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6)

The force-to-rebalance (FTR) closed-loop detection method is commonly used to expand the bandwidth (BW) for micro-electro-mechanical system (MEMS) gyr......

Design, analysis, and experimental performance of a novel micro-nozzle based liquid metal direct writing system

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (10)

The use of liquid alloy micro-printing methods for stretchable conductors and sensors has become a hot topic of micromachining research because of its......

Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (10)

This paper investigates the characteristics of higher-order transverse mode fully clamped membrane resonators that are piezoelectrically transduced as......

A reconfigurable and portable acoustofluidic system based on flexible printed circuit board for the manipulation of microspheres

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (7)

Acoustofluidic devices based on surface acoustic waves (SAWs) have been widely applied in biomedical research for the manipulation and separation of c......

Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors

期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6)

In this paper, an analytical method of resonant frequency, tuning range, the effective relative dielectric constant, and characteristic impedance is p......

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