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Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors

Han, K; Liu, YB; Guo, XB; Jiang, ZX; Ye, NJ; Wang, PM

Han, K (corresponding author), Beijing Univ Posts & Telecommun, Sch Elect Engn, Beijing, Peoples R China.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021; 31 (6):

Abstract

In this paper, an analytical method of resonant frequency, tuning range, the effective relative dielectric constant, and characteristic impedance is p......

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