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JOURNAL OF MICROMECHANICS AND MICROENGINEERING

出版年份:1991 年文章数:4305 投稿命中率: 开通期刊会员,数据随心看

出版周期:Monthly 自引率:10.6% 审稿周期: 开通期刊会员,数据随心看

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投稿信息
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中国人发表比例
2023年中国人文章占该期刊总数量暂无数据 (2022年为100.00%)
自引率
10.6 %
年文章数
4305
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期刊简介
稿件收录要求
Journal of Micromechanics and Microengineering covers all aspects of microelectromechanical structures, devices and systems, as well as micromechanics and micromechatronics. The journal aims to highlight the link between fabrication technologies and their capacity to create novel devices. The journal focuses on fundamental work in fabrication and process technologies, including bulk and surface micromachining, LIGA, EDM, bonding, lithography, and focussed ion beam techniques. New aspects of production techniques to create micromechanical systems and reliability aspects are reported. Applications of these techniques in sensor and actuator areas are covered. Typical devices include accelerometers, displays, resonators, micromotors, microvalves and pumps, micropositioners, microrobots, micro-optical systems and MEMS for RF applications. Methods to improve the achievable results are reported, such as CAD and modelling tools to predict the performance of micromechanical systems, and metrology to evaluate their performance. The journal also covers interface electronics and integration and vacuum microelectronics.
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