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JMEMS Letters Passive and Wireless Anemometer Based on Inductor Bending Effect

Liu, C; Yi, ZX; Qin, M; Huang, QA

Yi, ZX (通讯作者),Southeast Univ, Key Lab MEMS, Minist Educ, Nanjing 210096, Peoples R China.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (1): 3

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