JMEMS Letters Fused Silica Gyroscope Resonator Manufactured With Femtosecond Laser Assisted Wet Etching-MedSci.cn - 梅斯（MedSci）

JMEMS Letters Fused Silica Gyroscope Resonator Manufactured With Femtosecond Laser Assisted Wet Etching

Zhao, T; Zhuo, M; Zhou, X; Xi, X; Wu, XZ; Xiao, DB

Zhao, T; Zhuo, M (通讯作者)，Natl Univ Def Technol, Coll Intelligence Sci, Changsha 410073, Peoples R China.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (3): 315

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