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Incorporating Core-to-Core Correlation to Improve Partially Good Yield Models

Qi, XY; Rosner, RJ; Hopkins, J; Joseph, T; Walsh, B; Sinnott, A; Nair, BKG

Qi, XY (reprint author), Globalfoundries, Dept Prod Dev & Yield Engn, Malta, NY 12020 USA.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2019; 32 (4): 538

Abstract

New partially good yield models have been developed by considering core-to-core correlation. The new models take into account the physical mechanisms ......

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