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Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing

Zhu, F; Jia, XD; Miller, M; Li, X; Li, F; Wang, YL; Lee, J

Jia, XD (corresponding author), Univ Cincinnati, Dept Mech & Mat Engn, Cincinnati, OH 45220 USA.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2021; 34 (1): 65

Abstract

Feature design and selection is challenging because of huge data volume and high-mix production systems. Most engineers still rely on human experts to......

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