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Low-Destructive Processing of Single Crystal Aluminum Nitride Based on Sol-Gel Polishing Tool

Ma, ZQ; Lv, XB; Lu, J

Lu, J (corresponding author), Huaqiao Univ, Inst Mfg Engn, Xiamen 361021, Peoples R China.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2021; 34 (2): 217

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