Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model-MedSci.cn

Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model

Wan, Y; Liu, D; Liu, CC; Ren, JC

Liu, D (corresponding author), Xian Univ Technol, Natl & Local Joint Engn Res Ctr Crystal Growth Eq, Xian 710048, Peoples R China.; Liu, D (corresponding author), Xian Univ Technol, Shaanxi Key Lab Complex Syst Control & Intelligen, Xian 710048, Peoples R China.

Abstract

The growth process of Czochralski (Cz) silicon single crystal is a dynamic time-varying system with nonlinearity, strong coupling, large hysteresis, a......

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Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model

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