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Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors

Chen, Y; Hahner, D; Trubetskov, M; Schrameyer, S; Sakiew, W; Starke, K; Pervak, V

Pervak, V (corresponding author), Ludwig Maximilians Univ Muenchen, Coulombwall 1, D-85748 Garching, Germany.

APPLIED PHYSICS B-LASERS AND OPTICS, 2020; 126 (5):

Abstract

We have compared two kinds of dispersive mirrors (DMs) produced by magnetron sputtering and ion beam sputtering. One of them is a broadband DM which i......

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