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CMOS-Compatible Contacts to n-InP

Ghegin, E; Rodriguez, P; Pasquali, M; Sagnes, I; Labar, JL; Delaye, V; Card, T; Da Fonseca, J; Jany, C; Nemouchi, F

Ghegin, E (reprint author), STMicroelectronics, F-38926 Crolles, France.

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017; 64 (11): 4408

Abstract

In the context of the development of silicon photonics, various Ti- and Ni-based alloyed metallizations have been investigated for the purpose of form......

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