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Thermal Decomposition Mechanism of Environmental-Friendly Insulating Gas C5F10O on Cu (111) Surface

Zeng, FP; Feng, XX; Lei, ZC; Xia, YL; Wu, SY; Zhang, SL; Yao, Q; Tang, J

Zeng, FP (corresponding author), Wuhan Univ, Sch Elect Engn & Automat, Wuhan 430072, Peoples R China.

PLASMA CHEMISTRY AND PLASMA PROCESSING, 2021; 41 (5): 1455

Abstract

Since the environmental-friendly insulating gas C5F10O not only has good environmental compatibility, but also has excellent insulating properties, it......

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