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Protective nanometer films for reliable Cu-Cu connections

Berthold, T; Benstetter, G; Frammelsberger, W; Bogner, M; Rodriguez, R; Nafria, M

Benstetter, G (reprint author), Deggendorf Inst Technol, Dieter Gorlitz Pl 1, D-94469 Deggendorf, Germany.

MICROELECTRONICS RELIABILITY, 2017; 76 ( ): 383

Abstract

In this work, we report on the protective effect of platinum and carbon based films deposited onto Cu surfaces subject to pre-bonding temperature stre......

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