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Phosphorous-Doped alpha-Si Film Crystallization Using Heat-Assisted Femtosecond Laser Annealing

Zhan, XP; Su, Y; Fu, Y; Chen, JZ; Xu, HL

Chen, JZ (corresponding author), Shandong Univ, Sch Informat Sci & Engn, Qingdao 266237, Peoples R China.; Xu, HL (corresponding author), Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China.

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2020; 33 (1): 116

Abstract

Heat effects on femtosecond laser annealing to crystallize doped amorphous Si films are studied. The structural, optical and electronic properties of ......

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