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A self-adaptive DBSCAN-based method for wafer bin map defect pattern classification

Chen, SH; Yi, ML; Zhang, YX; Hou, XN; Shang, YL; Yang, P

Yang, P (corresponding author), Jiangsu Univ, Sch Mech Engn, Lab Adv Design Mfg & Reliabil MEMS NEMS ODES, Zhenjiang 212013, Jiangsu, Peoples R China.

MICROELECTRONICS RELIABILITY, 2021; 123 ():

Abstract

The wafer map is obtained by testing each die in the wafer during semiconductor production for defects and marking the defective die. The classificati......

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