Baidu
map

Characterization of morphological defects related to micropipes in 4H-SiC thick homoepitaxial layers

Yang, JW; Song, HP; Jian, JK; Wang, WJ; Chen, XL

Chen, XL (corresponding author), Songshan Lake Mat Lab, Dongguan 523808, Guangdong, Peoples R China.

JOURNAL OF CRYSTAL GROWTH, 2021; 568 ():

Abstract

A new type of morphological defects related to substrate micropipe is observed in 4H-SiC thick homoepitaxial layers. The structure and formation mecha......

Full Text Link


Baidu
map
Baidu
map
Baidu
map