JMEMS Letters Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy-MedSci.cn - 梅斯（MedSci）

JMEMS Letters Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy

Genter, KL; Brubaker, MD; Berweger, S; Gertsch, JC; Bertness, KA; Kabos, P; Bright, VM

Genter, KL (通讯作者)，Natl Inst Stand & Technol, Boulder, CO 80305 USA.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022; 31 (4): 483

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