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Piezoresistive microcantilevers for humidity sensing

Xu, JS; Bertke, M; Wasisto, HS; Peiner, E

Peiner, E (reprint author), Tech Univ Carolo Wilhelmina Braunschweig, Inst Semicond Technol IHT, Hans Sommer Str 66, D-38106 Braunschweig, Germany.; Peiner, E (reprint author), Tech Univ Carolo Wilhelmina Braunschweig, Lab Emerging Nanometrol LENA, Langer

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2019; 29 (5):

Abstract

Wide-range humidity sensing and monitoring applications including instrumentation, agriculture, meteorology, biomedicine, and food processing have att......

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