Parylene micropillars coated with thermally grown SiO2
Liu, XC; Fecko, P; Fohlerova, Z; Karasek, T; Pekarek, J; Neuzil, P
Neuzil, P (corresponding author), Northwestern Polytech Univ, Dept Microsyst Engn, Sch Mech Engn, Minist Educ,Key Lab Micro Nano Syst Aerosp, 127 West Youyi Rd, Xian 710072, Shaanxi, Peoples R China.; Neuzil, P (corresponding author), Brno Univ Technol, Cent European Inst Technol, Purkynova 123, Brno 61200, Czech Republic.; Neuzil, P (corresponding author), Brno Univ Technol, Fac Elect Engn & Commun, Dept Microelect, Tech 3058-10, Brno 61600, Czech Republic.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2020; 38 (6):